Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1983-10-13
1985-07-09
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
118500, 16510417, 165185, 165DIG4, 269 7, B05C 1300
Patent
active
045282080
ABSTRACT:
A method of controlling the temperature of an article comprised of predetermined material during treatment of the article in vacuum comprises providing a heat conductive substance having a solid, rigid state at the temperature of the treatment, having a molten state at a higher temperature below the minimum damage temperature of the article, and being chemically nonreactive, nonwetting and nonadhesive at the higher temperature with a first portion of the article. The first portion of the article to be treated is immersed in molten heat conductive substance, a second portion of the article to be treated remaining unimmersed, exposed for treatment, and the substance is caused to solidify about the immersed first portion. The solid heat conductive substance is maintained in heat conductive relationship with a temperature control surface, and the exposed second portion of the article is treated in vacuum while the temperature of the surface and thereby, via the heat conductive substance, the temperature of the article is controlled during treatment. Thereafter, following treatment, the heat conductive substance is reheated to cause the substance to be in molten state, and the treated article is removed. In one aspect, the method involves controlling the temperature of an article during treatment with ion beams under vacuum of pressure of the order of 10.sup.-5 torr. Apparatus is also described.
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Dearnaley et al., Ion Implantation North-Holland Publishing Co., London (1973), pp. 421-427.
Denholm A. Stuart
Hirvonen James K.
Wittkower Andrew B.
Newsome John H.
Zymet, Inc.
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