Electric heating – Metal heating – By arc
Patent
1990-04-25
1994-03-29
Paschall, Mark H.
Electric heating
Metal heating
By arc
21912141, 21912152, 156345, 31511121, 20429831, B23K 900
Patent
active
052987205
ABSTRACT:
A process chamber having voltage driven electrodes, e.g. plasma chamber, can be made self cleaning of particle contamination by appropriate design of the workpiece or electrode surface to provide protuberances, grooves or tapers thereon which result in a predetermined pattern in the electrostatic potential within the process chamber which can trap particulate contamination in preselected regions within the plasma chamber. These particles can then be channeled out of the process chamber through a pump port.
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Cuomo Jerome J.
Grazioso Michael V.
Guarnieri Charles R.
Haller Kurt L.
Heidenreich, III John E.
International Business Machines - Corporation
Morris Daniel P.
Paschall Mark H.
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