Electrolysis: processes – compositions used therein – and methods – Electrolytic synthesis – Preparing inorganic compound
Patent
1996-12-06
1999-07-20
Phasge, Arun S.
Electrolysis: processes, compositions used therein, and methods
Electrolytic synthesis
Preparing inorganic compound
204252, 204263, 117 99, 438935, C25B 100
Patent
active
059252324
ABSTRACT:
Described are methods and apparatuses for the electrochemical generation and constant concentration delivery of high purity gases used in the production of semiconductors and the doping of semiconductors.
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Electron Tranfer Technologies
Phasge Arun S,.
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