Optics: measuring and testing – By light interference – Having light beams of different frequencies
Reexamination Certificate
2005-01-04
2005-01-04
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
Having light beams of different frequencies
C356S498000, C356S500000
Reexamination Certificate
active
06839141
ABSTRACT:
In general, in one aspect, the invention features a method, including interferometrically measuring first and second optical path lengths to a measurement object along respective first and second paths, wherein the measurement of the optical path lengths includes directing first and second measurement beams to reflect from the measurement object, measuring propagation directions of the first and second measurement beams, compensating the first measured optical path length for time-varying optical properties of gas in the first path based on the first and second measured optical path lengths and the first and second measured propagation directions.
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Fish & Richardson P.C.
Turner Samuel A.
Zygo Corporation
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