Method and apparatus for compensation of time-varying...

Optics: measuring and testing – By light interference – Having light beams of different frequencies

Reexamination Certificate

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C356S498000, C356S500000

Reexamination Certificate

active

06839141

ABSTRACT:
In general, in one aspect, the invention features a method, including interferometrically measuring first and second optical path lengths to a measurement object along respective first and second paths, wherein the measurement of the optical path lengths includes directing first and second measurement beams to reflect from the measurement object, measuring propagation directions of the first and second measurement beams, compensating the first measured optical path length for time-varying optical properties of gas in the first path based on the first and second measured optical path lengths and the first and second measured propagation directions.

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Bennett, S.J. “A Double-Pased Michelson Interperometer.”Optics Communications, 4:6, pp. 428-430, 1972.
Bobroff, N. “Recent advances in displacement measuring interferometry.”Meas. Sci. Technol, 4: pp. 907-926, 1993.
Oka, K. et al. “Polarization heterodyne interferometry using another local oscillator beam.”Optics Communications, 92, pp. 1-5, 1992.

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