Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1989-03-17
1990-05-29
Weisstuch, Aaron
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
20429841, 427 37, C23C 1432
Patent
active
049293214
ABSTRACT:
A method and arrangement for the vacuum coating of workpieces by arc evaporation, comprises at least one evaporating cathode with a surface to be evaporated, an axis of the cathode intersecting the cathode surface. Workpieces to be coated are arranged around the axis at locations which are spaced radially outwardly and at an axial distance from the cathode surface. In order to prevent direct line of sight communication between the cathode surface and the workpieces, a visual shield is positioned between the cathode surface and the workpieces, which at least partly surrounds the axis. In this way, the ions which are evaporated from the cathode surface are deflected outwardly around the visual shield and toward the workpieces.
REFERENCES:
patent: 4191888 (1980-03-01), Meadows
patent: 4452686 (1984-06-01), Axenov et al.
patent: 4492845 (1985-01-01), Kljuchko et al.
patent: 4511593 (1985-04-01), Brandolf
"Transport of plasma streams in a curvilinear plasma-optics system", I. I. Aksenov et al. Soviet Journal Plasma Physics 4(4), Jul.-Aug. 1978.
Patent Abstracts of Japan, vol. 10, No. 170(E-412)(2226), Jun. 17, 1986: & JP-A-61-22548 (Hitachi Seisakusho K.K.) Jan. 31, 1986.
Nuclear Instruments and Methods, vol. 185, Nos.1-3, Jun. 1981, pp. 25-27, North-Holland Publ. Co., Amsterdam/NL; J. H. Whealton: "Improvement of gas efficiency of negative ion sources".
Patent Abstracts of Japan, vol. 6, No. 72(E-105), May 7, 1982; & JP-A-57-11447 (Tokyo Shibaura Denki K.K.) Jan. 21, 1982.
Patent Abstracts of Japan, vol. 4, No. 170 (E-35)(652), 22 Nov. 1980; & JP-A-55-117856 (Hitachi Seisakusho K.K.) Sep. 10, 1980.
V. A. Saenko et al, "Source of plasma of metal vapours with a hollow cathode", Fizika i Khimiya Obrabotki Materialo vol. 20, No. 2 (1986), pp. 60-63.
V. A. Osipov et al., "Unit for depositing coatings by precipitation of ions extracted from a vacuum-arc plasma", Pribory i Tekhnika Eksperimenta vol. 6, pp. 173-175 (1978).
D. M. Sanders and E. A. Pyle, "Magnetic enhancement of cathodic arc deposition" J. Vac. Sci Technol. A 5(4), Jul-Aug. 1987, pp. 2728-2731.
I. I. Aksenov et al., "High-efficiency source of pure carbon plasma", Sov. Phys. Tech. Phys. 25(9) Sep. 1980, pp 1164-1166.
D. M. Sanders, "Ion beam self-sputtering using a chathodic arc ion source", J. Vac. Sci. Technol. A 6(3), May-Jun. 1988, pp. 1929-1930.
Ian G. Brown et al., "High current ion source", Appl. Phys. Lett. vol. 47, No. 4 Aug. 15, 1985, pp. 358-360.
Balzers Aktiengesellschaft
Weisstuch Aaron
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