Coating apparatus – Control means responsive to a randomly occurring sensed... – Condition of coated material
Patent
1997-08-21
1999-08-17
Simmons, David A.
Coating apparatus
Control means responsive to a randomly occurring sensed...
Condition of coated material
118712, 2502222, 250574, 356337, G03G 1508, G01V 800
Patent
active
059388471
ABSTRACT:
Disclosed herein is a method and an apparatus for applying a coating liquid to an object from a liquid-applying member at a first prescribed position, thereby forming a film on the object. Before the coating liquid at the first position, the coating liquid is applied at a second predetermined position. An impurity-detecting device detects the impurities contained in the coating liquid applied at the second position. A particle-counting device is provided, and a switching device is provided on a liquid-supplying pipe extending from a source of the coating liquid to the liquid-applying member. The switching device switches the supply of the coating liquid between the liquid-applying member and the impurity-detecting device. The impurities in the coating liquid can thereby monitored.
REFERENCES:
patent: 5002008 (1991-03-01), Ushijima et al.
patent: 5090808 (1992-02-01), Ishikawa et al.
patent: 5509375 (1996-04-01), Sayka et al.
Akimoto Masami
Sakamoto Kazuo
Semba Norio
Yoshioka Kazutoshi
Padgett Calvin
Simmons David A.
Tokyo Electron Limited
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