Method and apparatus for CO.sub.2 cleaning with mitigated ESD

Details Method and apparatus for CO.sub.2 cleaning with mitigated ESD Method and apparatus for CO.sub.2 cleaning with mitigated ESD

1995-08-30

1997-07-29

Warren, Jill

Cleaning and liquid contact with solids

Processes

Gas or vapor condensation or absorption on work

134 6, 134 7, 134 9, 134 26, 134 72, 134902, 451 38, 451 39, 451 75, 451 78, B08B 500

Patent

active

056518340

ABSTRACT:
An object (12) may be cleaned by CO.sub.2 reduced ESD by directing a first water mist (23) at a surface (14) of the object while imparting a relative motion between the object board and the mist to form a film of water on the object surface. As the relative motion is imparted between the board and the first mist (23), a second water mist (32) is injected into a stream (30) of solid CO.sub.2 particles (27) directed at the object surface downstream of the first mist. Water droplets in the second mist in the second mist combine with the CO.sub.2 particles to create carbonic acid that disassociates into charged ions that increase the conductivity of the water film, allowing for increased charge dissipation, thus reducing the incidence of ESD.

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