Method and apparatus for co-ordinate measuring using a capacitan

Details Method and apparatus for co-ordinate measuring using a capacitan Method and apparatus for co-ordinate measuring using a capacitan

1990-09-04

1993-02-23

Harvey, Jack B.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

324457, 324663, 324684, G01R 2912, G01R 2726

Patent

active

051893770

ABSTRACT:
The surface parameters and characteristics of a conductive workpiece are determined by applying a voltage between the workpiece and a capacitance probe having proximity sensing capabilities, and moving the probe in two or three co-ordinate axes relative to the workpiece while measuring the capacitance between the probe and workpiece, and controlling the probe velocity and/or direction within a stand-off band adjacent to the workpiece as a function of the capacitance value measured for purposes of effecting significant real time process controls, and determining the workpiece surface parameters as a function of the probe movement and capacitance measured.

REFERENCES:
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patent: 2935681 (1960-05-01), Anderson
patent: 3263167 (1966-07-01), Foster et al.
patent: 3805250 (1974-04-01), Abbe
patent: 4384332 (1983-05-01), McMurtry
patent: 4498043 (1985-02-01), Heathcote et al.
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patent: 4806848 (1989-02-01), Deiners
patent: 4814691 (1989-03-01), Garbini
patent: 4816744 (1989-03-01), Papurt
patent: 4931887 (1990-06-01), Hedge et al.
patent: 5065103 (1991-11-01), Slinkman et al.
Scanning Capacitance Microscopy Bugg et al. IOP Publishing Ltd. 1988.

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