Coating apparatus – With cleaning or reconditioning work support or conveyer
Patent
1997-09-23
2000-12-12
Coe, Philip R.
Coating apparatus
With cleaning or reconditioning work support or conveyer
118 52, 1341041, 1341042, 134902, B05C 906, B05C 1100
Patent
active
061592889
ABSTRACT:
An apparatus for a treatment is provided, the apparatus comprising a vessel for recovering a treatment liquid flowing out or flying out when the object is treated, cleaning means for cleaning an inner wall surface of the vessel by supplying a cleaning liquid into the vessel, and a circulation system for recovering a discharged liquid discharged from the vessel when the inner wall surface of the vessel is cleaned by the cleaning means and supplying the recovered liquid to the cleaning means.
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Honda Yoichi
Matsuda Yoshitaka
Motoda Kimio
Sada Tetsuya
Sakai Mitsuhiro
Coe Philip R.
Tokyo Electron Limited
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