Method and apparatus for cleaning surfaces to absolute or near-a

Details Method and apparatus for cleaning surfaces to absolute or near-a Method and apparatus for cleaning surfaces to absolute or near-a

1990-05-18

1991-08-13

Morris, Theodore

Cleaning and liquid contact with solids

Processes

Using sequentially applied treating agents

134 30, 134 95, 134 98, 134108, 134111, B08B 302

Patent

active

050393499

ABSTRACT:
A method and apparatus for cleaning surfaces to absolute or near-absolute cleanliness involves spraying jets of heated cleaning solution so that it flows over and scrubs the surfaces to be cleaned. The cleaning solution is continuously recirculated and filtered during cleaning to remove over 99% of all particles having a diameter equal to or greater than 0.02.mu.. The cleaned surface is rinsed with heated, filtered deionized water and dried to provide a surface having absolute or nearly-absolute cleanliness to the limit of the best commercial instrumentation, e.g., .ltoreq. five particles with a diameter of .gtoreq.0.02.mu. per cubic foot of gas flowed over a cleaned surface as detected by a laser particle counter. The method is useful for cleaning gas valves and regulators and components thereof as well as existing gas flow equipment, for example, for use in semiconductor processing equipment. The cleaned surfaces are sterile and therefore also useful in the health and pharmaceutical industries.

REFERENCES:
patent: 4129457 (1978-12-01), Basi
patent: 4325746 (1982-04-01), Popplewell et al.
patent: 4409999 (1983-10-01), Pedziwiatr
patent: 4606850 (1986-08-01), Malik
patent: 4749440 (1988-06-01), Blackwood et al.

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