Abrading – Abrading process – Utilizing fluent abradant
Patent
1994-04-13
1997-07-29
Eley, Timothy V.
Abrading
Abrading process
Utilizing fluent abradant
451 81, 451 87, 451 89, 451 99, B24B 100, B24C 106, B24C 312
Patent
active
056517238
ABSTRACT:
A method and apparatus for cleaning a substrate in preparation for thin film coating. The invention involves cleaning the substrate in a cleaning chamber under controlled conditions by a blast of carbon dioxide pellets suspended in and transported by a compressed gas medium.
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Bjornard Erik J.
Hoffman Jeffrey J.
Kurman Eric W.
Shogren David A.
Eley Timothy V.
Viratec Thin Films, Inc.
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