Method and apparatus for cleaning electronic parts

Details Method and apparatus for cleaning electronic parts Method and apparatus for cleaning electronic parts

1995-10-27

1997-06-03

Phasge, Arun S.

Electrolysis: processes, compositions used therein, and methods

Electrolytic material treatment

Water, sewage, or other waste water

205747, 205751, 205770, 204252, 204263, 204264, 204275, 204276, 134 28, 134109, C02F 1461

Patent

active

056350538

ABSTRACT:
Electric parts including semiconductor substrates, glass substrates and the like are washed with various cleaning solutions. After the cleaning, said parts are cleaned with either anolyte or catholyte electrolytic ionized water (EIW) produced from deionized water.

REFERENCES:
patent: 4828660 (1989-05-01), Clark et al.

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