Method and apparatus for cleaning a web-based chemical...

Details Method and apparatus for cleaning a web-based chemical... Method and apparatus for cleaning a web-based chemical...

2006-01-18

2008-10-21

Rachuba, Maurina (Department: 3723)

Abrading

Machine

Rotary tool

C451S443000, C451S444000, C451S307000, C216S053000, C216S089000, C222S132000, C222S142200

Reexamination Certificate

active

07438632

ABSTRACT:
A method and apparatus for cleaning a web-based chemical-mechanical planarization (CMP) system. Specifically, a fluid spray bar is coupled to a frame assembly which may be mounted on a CMP system. The fluid spray bar will move along the frame assembly. As the fluid spray bar traverses the length of the frame assembly, a cleaning fluid is sprayed onto the web in order to clean the web between planarization cycles.

REFERENCES:
patent: 3604434 (1971-09-01), Hurst
patent: 4150512 (1979-04-01), Novak
patent: 4525955 (1985-07-01), Cothrell et al.
patent: 5274964 (1994-01-01), Simpson et al.
patent: 5645682 (1997-07-01), Skrovan
patent: 5997392 (1999-12-01), Chamberlin et al.
patent: 6102782 (2000-08-01), Custer et al.
patent: 6139402 (2000-10-01), Moore
patent: 6146246 (2000-11-01), Custer et al.
patent: 6149512 (2000-11-01), Wilson et al.
patent: 6152808 (2000-11-01), Moore
patent: 6162113 (2000-12-01), Armstrong
patent: 6187681 (2001-02-01), Moore
patent: 6193588 (2001-02-01), Carlson et al.
patent: 6196899 (2001-03-01), Chopra et al.
patent: 6261163 (2001-07-01), Walker et al.
patent: 6273796 (2001-08-01), Moore
patent: 6284092 (2001-09-01), Manfredi
patent: 6306014 (2001-10-01), Walker et al.
patent: 6354930 (2002-03-01), Moore
patent: 6358127 (2002-03-01), Carlson et al.
patent: 6361411 (2002-03-01), Chopra et al.
patent: 6364757 (2002-04-01), Moore
patent: 6368193 (2002-04-01), Carlson et al.
patent: 6390910 (2002-05-01), Moore
patent: 6394883 (2002-05-01), Carlson et al.
patent: 6402601 (2002-06-01), Walker et al.
patent: 6419560 (2002-07-01), Walker et al.
patent: 6425802 (2002-07-01), Custer et al.
patent: 6428404 (2002-08-01), Walker et al.
patent: 6447369 (2002-09-01), Moore
patent: 6669538 (2003-12-01), Li et al.
patent: 7063603 (2006-06-01), Moore et al.
patent: 2001/0029155 (2001-10-01), Bennett et al.
patent: 2002/0016136 (2002-02-01), Birang et al.
Spraying Systems Co. (www.spray.com/pdf/airctrl.pdf).
EXAIR (www.exair.com/airknife/stdak—page.htm).

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