Method and apparatus for cleaning a test probe

Details Method and apparatus for cleaning a test probe Method and apparatus for cleaning a test probe

1997-06-13

1999-10-05

Warden, Jill

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

134 6, 134 42, 324757, 436 49, B08B 312

Patent

active

059617284

ABSTRACT:
A method and apparatus for cleaning a test probe of a semiconductor probe card. In one embodiment, the method of cleaning includes the steps of placing the test probes in contact with a textured cleaning surface and providing a vibrational movement to the cleaning surface.

REFERENCES:
patent: 3453545 (1969-07-01), Oates
patent: 3628144 (1971-12-01), Aronstein
patent: 3996516 (1976-12-01), Luther
patent: 4590422 (1986-05-01), Milligan
patent: 4780836 (1988-10-01), Miyazaki et al.
patent: 4820976 (1989-04-01), Brown
patent: 5128612 (1992-07-01), Aton et al.
patent: 5436571 (1995-07-01), Karasawa

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