Method and apparatus for chemical monitoring

Details Method and apparatus for chemical monitoring Method and apparatus for chemical monitoring

2006-06-30

2008-11-25

Evans, F. L. (Department: 2877)

Optics: measuring and testing

With plural diverse test or art

C356S316000, C436S016000

Reexamination Certificate

active

07456939

ABSTRACT:
The present invention relates to monitoring chemicals in a process chamber using a spectrometer having a plasma generator, based on patterns over time of chemical consumption. The relevant patterns may include a change in consumption, reaching a consumption plateau, absence of consumption, or presence of consumption. In some embodiments, advancing to a next step in forming structures on the workpiece depends on the pattern of consumption meeting a process criteria. In other embodiments, a processing time standard is established, based on analysis of the relevant patterns. Yet other embodiments relate to controlling work on a workpiece, based on analysis of the relevant patterns. The invention may be either a process or a device including logic and resources to carry out a process.

REFERENCES:
patent: 5326975 (1994-07-01), Barna
patent: 6769288 (2004-08-01), Ward et al.
patent: 6975393 (2005-12-01), Mettes
patent: 2002/0093652 (2002-07-01), Powell

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