Method and apparatus for chemical mechanical polishing

Details Method and apparatus for chemical mechanical polishing Method and apparatus for chemical mechanical polishing

1997-09-29

1999-03-30

Morgan, Eileen P.

Abrading

Abrading process

Glass or stone abrading

451 8, 451 9, 451 55, 451285, 451287, 451288, B24B 500

Patent

active

058881204

ABSTRACT:
A method and apparatus provides a method for polishing a surface of a substrate with a polishing pad. The surface of the substrate is polished using the polishing pad. The surface of the substrate is deformed in response to changes in the polishing pad, wherein deformation of the surface of the substrate increases uniformity in polishing of the surface of the substrate.

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patent: 5607341 (1997-03-01), Leach
patent: 5624299 (1997-04-01), Shendon
patent: 5643060 (1997-07-01), Sandhu et al.

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