Method and apparatus for checking the integrity of a device test

Details Method and apparatus for checking the integrity of a device test Method and apparatus for checking the integrity of a device test

1995-07-05

1997-04-15

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

G01R 3102

Patent

active

056213123

ABSTRACT:
A method and apparatus for checking the integrity of a device tester used in the manufacture of semiconductor devices. A device tester is used to exercise different aspects of a semiconductor device. The tester is programmed with appropriate control software that fully tests the electrical and functional characteristics of the semiconductor device.

REFERENCES:
patent: 3039604 (1962-06-01), Bickel et al.
patent: 3599092 (1971-08-01), Silverman
patent: 5448164 (1995-09-01), Selley et al.

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