Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2008-03-18
2008-03-18
Nguyen, Sang H. (Department: 2886)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000, C250S216000
Reexamination Certificate
active
10875555
ABSTRACT:
The invention provides a method and apparatus for evaluating the quality of microelectromechanical devices having deformable and deflectable members using resonation techniques. Specifically, product quality characterized in terms of uniformity of the deformable and deflectable elements is inspected with an optical resonance mapping mechanism on a wafer-level.
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Feinstein Casey
Simonian Dmitri
Brady III Wade James
Nguyen Sang H.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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