Optical waveguides – Accessories – Attenuator
Reexamination Certificate
2005-10-11
2005-10-11
Healy, Brian M. (Department: 2883)
Optical waveguides
Accessories
Attenuator
C385S015000, C385S016000, C385S018000, C385S031000, C385S017000
Reexamination Certificate
active
06954579
ABSTRACT:
An improved device, which may act as a variable attenuator, changes the optical intensity of an optical signal by moving a platform onto which a light transmissive structure such as a waveguide is disposed. The light transmissive structure is positioned and aligned to receive an optical signal and positioned and aligned to transmit the optical signal. By moving the light transmissive structure into a position of reduced alignment with an input source, the light transmissive structure may receive less or none of the optical signal, thereby attenuating it. Alternatively, by moving the light transmissive structure into a position of reduced alignment with an output structure, the light transmissive structure may transmit less or none of the optical signal, thereby attenuating its transmission.
REFERENCES:
patent: 4693547 (1987-09-01), Soref et al.
patent: 5095519 (1992-03-01), Dorsey
patent: 5235672 (1993-08-01), Carson
patent: 5245458 (1993-09-01), Taylor
patent: 5727099 (1998-03-01), Harman
patent: 5757986 (1998-05-01), Crampton et al.
patent: 5761350 (1998-06-01), Koh
patent: 5828800 (1998-10-01), Henry et al.
patent: 5864643 (1999-01-01), Pan
patent: 5923798 (1999-07-01), Aksyuk et al.
patent: 5990473 (1999-11-01), Dickey et al.
patent: 6072924 (2000-06-01), Sato et al.
patent: 6102582 (2000-08-01), Espindola et al.
patent: 6137941 (2000-10-01), Robinson
patent: 6148124 (2000-11-01), Aksyuk et al.
patent: 6205267 (2001-03-01), Aksyuk et al.
patent: 6647170 (2003-11-01), Hsu
patent: 6690847 (2004-02-01), Hsu
patent: 2002/0054748 (2002-05-01), Hsu
patent: 1004910 (2000-05-01), None
Benaissa, K.; and Nathan, A.; “Silicon Anti-Resonant Reflecting Optical Waveguides for Sensor Applications;”Journal of Sensors and Actuators(A Physical), vol. A65, 33-44, 1998.
Brown, K.S.; Taylor, B.J.; Dawson; J.M.; Hornak, L.A.; “Polymer Waveguide Co-integration With Microelectromechanical Systems (MEMS) for Integrated Optical Metrology;”Proceedings of the SPIE(The International Society for Optical Engineering), vol. 3276, 1998.
Burcham, Kevin E.; and Boyd, Joseph T.; “Freestanding, Micromachined, Multimode Silicon Optical Waveguides at λ=1.3 μm for Microelectromechanical System Technology;”Journal of Applied Optics,vol. 37, No. 36, Dec. 20, 1998.
Churenkov, A.V.; “Silicon Micromechanical Optical Waveguide for Sensing and Modulation;”Journal of Sensors and Actuators(A Physical), vol. A57, No. 1, Oct. 1996.
Cook, J.P.D.; Este, G.O.; Shepherd, F.R.; et al.; “Stable, Low-Loss Optical Waveguides and Micromirrors Fabricated in Acrylate Polymers”Applied Optics Journal,vol. 37, No. 7, Mar. 1, 1998.
Cornett, Kimberly T.; Heritage, Jonathan P.; Solgaard, Olav; “Compact Optical Delay Line Based on Scanning Surface Micromachined Polysilicon Mirrors;”2000 IEEE/LEOS International Conference on Optical MEMS,Kauai, Hawaii, Aug. 21-24, 2000.
de Labachelerie, M.; Kaou, N.; et al.; “A Micromachined Connector for the Coupling of Optical Waveguides and Ribbon Optical Fibers;”Journal of Sensors and Actuators(A Physical), vol. A89, No. 1-2, Mar. 20, 2001.
Eng, Terry T.H.; Kan, Sidney C.; and Wong, George K.L.; “Voltage-Controlled Micromechanical SOI Optical Waveguides;”IEEE TENCON, IEEE Region 10 International Conference on Microelectronics and VLSL—“Asia Pacific Microelectronics 2000”—Proceedings,1995.
Eng, Terry T.H.; Kan, Sidney C.; and Wong, George K.L.; “Surface-Micromachined Epitaxial Silicon Cantilevers as Movable Optical Waveguides on Silicon-on-Insulator Substrates;”Journal on Sensors and Actuators A, Physical,vol. A49, No. 1-2, Jun. 1995.
Eng, Terry T.H.; Kan, Sidney C.; and Wong, George K.L.; “Surface-Micromachined Movable SOI Optical Waveguides;”Proceedings of the International Solid-State Sensors and Actuators Conference—Transducer,1995.
Gorecki, Christophe; “Optimization of Plasma-Deposited Silicon Oxinitride Films for Optical Channel Waveguides;”Journal of Optics and Laser Engineering,vol. 33, No. 1, Jan. 2000.
Haronian, D.; “Bottlenecks of Opto-MEMS;”SPIE Proceedings—Micro-Opto-Electro-Mechanical Systems,Glasgow, UK, May 22-23, 2000.
Haronian, D.; “Displacement Sensing Using Geometrical Modulation in Reflection Mode (GM-RM) of Coupled Optical Waveguides;”Journal of Micromechanics and Microengineering,vol. 8, No. 4, Dec. 1998.
Haronian, D.; “Suspended Optical Waveguide With In-Plane Degree of Freedom or Microelectro-Mechanical Applications;”Electronics Letters,vol. 34, No. 7, Apr. 2nd, 1998.
Hoffmann, Martin; Kopka, Peter; and Voges, Edgar; “Thermooptical Digital Switch Arrays in Silica-on-Silicon With Defined Zero-Voltage State;”Journal of Lightwave Technology,vol. 16, No. 3, Mar. 1998.
Jin, Young-Hyun; Seo, Kyoung-Sun; et al.; “An SOI Optical Microswitch Integrated With Silicon Waveguides and Touch-down Micromirror Actuators;”2000 IEEE/LEOS International Conference on Optical MEMS,Aug. 21-24, 2000.
Koyanagi, Mitsumasa; “Optical Interconnection Using Polyimide Waveguide for Multi-Chip Module;”Proceedings of SPIE, Society of Photo-Optical Instrumentation Engineers,San Jose, CA, 1996.
Kruger, Michiel V.P.; Guddal, Michael H.; et al.; “Low Power Wireless Readout of Autonomous Sensor Wafer Using MEMS Grating Light Modulator;”2000 IEEE/LEOS International Conference on Optical MEMS,Kauai, Hawaii, Aug. 21-24, 2000.
Kuwana, Yasuhiro;Hirose, Akinori; Kurino, Hiroyuki; et al.; “Signal Propagation Characteristics in Polyimide Optical Wave-guide With Micro-Mirrors for Optical Multichip Module;”Japanese Journal of Applied Physics,vol. 38, No. 4B, Apr. 1999.
Makihara, M.; “Microelectromechanical Intersecting Waveguide Optical Switch Based on Thermo-Capillarity;”2000 IEEE/LEOS International Conference on Optical MEMS,Kauai, Hawaii, Aug. 21-24, 2000.
Makihara, M.; Sato, Makoto; Shimokawa, Fusao; et al.; “Micromechanical Optical Switches Based on Thermocapillary Integrated in Waveguide Substrate;”Journal of Lightwave Technology,vol. 17, No. 1, Jan. 1999.
Makihara, M.; Shimokawa, F.; and Nishida, Y.; “Self-Holding Optical Waveguide Switch Controlled by Micromechanism;”IEICE Trans. Electronics(Japan), vol. E80-C, No. 2, Feb. 1997.
Maruo, Shoji; Ikuta, Koji; and Ninagawa, Toshihide; “Multi-Polymer Microstereolithography for Hybride Opto-MEMS” has the same information as “Advanced Micro Sterelithography with Multi UV Polymers (System Development and Application to Three-Dimensional Optical Waveguides),” which is written in Japanese;Journal of Transactions of the Institute of Electrical Engineers of Japan, Part E,vol. 120-E, No. 7, Jul. 2000.
Matsumoto, Takuji; Kuwana, Yasuhiro; Hirose, Akinori; “Polyimide Optical Waveguide With Multi-Fan-Out For Multichip Module System;”Proceedings from the Optoelectronic Interconnects V,vol. 3288, San Jose, CA Jan. 28-29, 1998.
Matsumoto, Takuji; Fukuoka, Takeshi; Kurino, Hiroyuki; et al.; “Polyimide Optical Waveguide With Multi-Fan-Out for Multi-Chip Module Application;”Proceedings of the 27thEuropean Solid-State Device Research Conference,France, Sep. 22-24, 1997.
Matsumoto, Takuji et al., “Polyimide Optical Waveguide with Multi-Fan-Out for Multi-Chip Module Application,”Jpn. J. Appl. Phys.,vol. 36 (1997) Pt. 1, No. 38, pp. 1903-1906.
Moisel, Jorg; Guttmann, Joachim; Huber, Hans-Peter; “Optical Backplanes With Integrated Polymer Waveguides,”Journal of Optical Engineering,vol. 39, No. 3, Mar. 2000.
Mueller, Raluca; Pavelescu; and Manea, Elena; “3D Microstructures Integrated With Optical Waveguides and Photodiodes on Silicon,”MELECOB 1998 9thMediterranean Electromechanical Conference Proceedings,vol. 1; May 18-20, 1998.
Namba, Tohru; Uehara, Akihito; et al.; “High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips
LandOfFree
Method and apparatus for changing the optical intensity of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for changing the optical intensity of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for changing the optical intensity of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3460108