Method and apparatus for cathodic arc ion plasma deposition

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

Reexamination Certificate

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Details

C204S298210, C204S298220, C204S422000, C204S298010, C427S569000, C427S540000, C427S580000, C118S715000

Reexamination Certificate

active

07879203

ABSTRACT:
A method and apparatus for depositing a coating material on a surface of a substrate by an ion plasma deposition process using a hollow cathode is disclosed. The cathode may be a substantially cylindrical hollow cathode. A plasma arc is formed on the outer circumference of the cathode to remove coating material from the cathode, which is then deposited on a surface of a substrate. An internal arc drive magnet is contained within the hollow bore of the cathode and cooling is provided to the magnet during operation.

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