Method and apparatus for calibrating deformable mirrors having r

Optics: measuring and testing – By polarized light examination – With light attenuation

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350360, 356376, G01B 2120

Patent

active

049233025

ABSTRACT:
An apparatus and method for calibrating deformable mirrors having replaceable actuators are disclosed. The mirror to be calibrated is mounted on an x-y table to permit selective movement of the mirror between an actuator position adjustor means and a sensor probe which senses the extent of deflection of the mirror's reflecting surface. A light source provides a source of illumination for selectively illuminating areas of the reflecting surface in the vicinity of an actuator to be adjusted. A photodetector array receives the reflected light and transmits its output to a controller which computes the distance between the sensor probe and the reflecting surface. The controller may be used to selectively energize the actuator position adjustor means to control the extent that one or more actuators influence the shape of the mirror's reflecting surface.

REFERENCES:
patent: 3761179 (1973-09-01), Plummer et al.
patent: 3821771 (1975-03-01), Scott
patent: 3923400 (1975-12-01), Hardy
patent: 4645917 (1987-02-01), Penney et al.

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