Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-02-07
2006-02-07
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
06995848
ABSTRACT:
Methods for determining an appropriate tuning rate for interferometry systems employing phase-shifting interferometry are disclosed.
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Fish & Richardson P.C.
Lyons Michael A.
Turner Samuel A.
Zygo Corporation
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