Method and apparatus for calibrating a metrology tool

Details Method and apparatus for calibrating a metrology tool Method and apparatus for calibrating a metrology tool

2006-01-13

2010-02-16

Dang, Phuc T (Department: 2892)

Active solid-state devices (e.g., transistors, solid-state diode

Incoherent light emitter structure

Encapsulated

C257S005000, C438S014000, C438S016000, C716S030000, C716S030000

Reexamination Certificate

active

07663156

ABSTRACT:
A method and apparatus for calibrating a metrology tool are disclosed. The apparatus includes a substrate having at least one calibration site formed thereon. The calibration site includes a pattern of cells that have at least one feature disposed in a surface of the substrate. The feature provided for measurement by a step height metrology tool and a phase metrology tool to calibrate the step height and phase metrology tools.

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Notification of the International Search Report and the Written Opinion for PCT/US04/23070, 7pages, mailed May 23, 2005.
Transmittal of International Preliminary Report on Patentability; PCT/US2004/023070; p. 5, mailing date Feb. 2, 2006.
Chinese Office Communication, Chinese Patent Application for Invention No. 200480026551.X, 5 pages, Apr. 10, 2009.
Chinese Office Communication, Chinese Patent Application for Invention No. 200480026551.X (PCT/US2004/023070), 12 pages, Jul. 18, 2008.

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