Method and apparatus for calibrating a metrology tool

Details Method and apparatus for calibrating a metrology tool Method and apparatus for calibrating a metrology tool

2005-02-01

2005-02-01

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Calibration or correction system

Sensor or transducer

C702S097000, C356S237200, C356S401000, C356S328000, C324S765010, C430S022000, C430S030000, C257S005000, C703S013000, C716S030000

Reexamination Certificate

active

06850858

ABSTRACT:
A method and apparatus for calibrating a metrology tool are disclosed. The method includes measuring a parameter of a contrast enhanced feature on an artifact using a metrology tool, where the contrast enhanced feature reduces random errors in the metrology tool during the measuring process. The measured parameter is compared with an initial parameter associated with the artifact and the metrology tool is adjusted until the measured parameter matches the initial parameter.

REFERENCES:
patent: 5383136 (1995-01-01), Cresswell et al.
patent: 5602492 (1997-02-01), Cresswell et al.
patent: 5965309 (1999-10-01), Ausschnitt et al.
patent: 6301008 (2001-10-01), Ziger et al.
patent: 6581193 (2003-06-01), McGhee et al.
patent: 6597447 (2003-07-01), Stirton et al.
patent: 20020035461 (2002-03-01), Chang et al.
patent: 20020100903 (2002-08-01), Singh et al.
patent: 20020102482 (2002-08-01), Smith et al.
patent: 20020158193 (2002-10-01), Sezginer et al.
patent: 20020171828 (2002-11-01), Cohen et al.

Affiliated with

Also associated with

Rating

Method and apparatus for calibrating a metrology tool does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for calibrating a metrology tool, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for calibrating a metrology tool will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3453722