Method and apparatus for blending process materials

Details Method and apparatus for blending process materials Method and apparatus for blending process materials

2003-07-18

2008-03-18

Soohoo, Tony G (Department: 1797)

Agitating

Having interrelated feed and discharge means

Recirculating from and to mixing chamber

C366S152100, C366S189000

Reexamination Certificate

active

07344298

ABSTRACT:
A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals.

REFERENCES:
patent: 3161203 (1964-12-01), Hathorn et al.
patent: 4059929 (1977-11-01), Bishop
patent: 4242841 (1981-01-01), Ushakov et al.
patent: 4327759 (1982-05-01), Millis
patent: 4362033 (1982-12-01), Young
patent: 4439042 (1984-03-01), Bertoglio
patent: 4474476 (1984-10-01), Thomsen
patent: 4642222 (1987-02-01), Brazelton
patent: 4654802 (1987-03-01), Davis
patent: 4784495 (1988-11-01), Jonsson et al.
patent: 4964732 (1990-10-01), Cadeo et al.
patent: 5114239 (1992-05-01), Allen
patent: 5255821 (1993-10-01), Hall et al.
patent: 5271521 (1993-12-01), Noss et al.
patent: 5332125 (1994-07-01), Schmitkons et al.
patent: 5372421 (1994-12-01), Pardikes
patent: 5407526 (1995-04-01), Danielson et al.
patent: 5409310 (1995-04-01), Owczarz
patent: 5423607 (1995-06-01), Jones et al.
patent: 5476320 (1995-12-01), Taguchi et al.
patent: 5478435 (1995-12-01), Murphy et al.
patent: 5516423 (1996-05-01), Conoby et al.
patent: 5584959 (1996-12-01), Kimura et al.
patent: 5634715 (1997-06-01), Stehr et al.
patent: 5641410 (1997-06-01), Peltzer
patent: 5647391 (1997-07-01), Chan et al.
patent: 5750440 (1998-05-01), Vanell et al.
patent: 5800056 (1998-09-01), Suzuki et al.
patent: 5823219 (1998-10-01), Purvis et al.
patent: 5924794 (1999-07-01), O'Dougherty et al.
patent: 5935332 (1999-08-01), Caucal
patent: 5993671 (1999-11-01), Peltzer
patent: 6048256 (2000-04-01), Obeng et al.
patent: 6050283 (2000-04-01), Hoffman et al.
patent: 6105606 (2000-08-01), Jackson
patent: 6109778 (2000-08-01), Wilmer
patent: 6149294 (2000-11-01), Jonsson et al.
patent: 6199599 (2001-03-01), Gregg et al.
patent: 6217659 (2001-04-01), Botelho et al.
patent: 6224778 (2001-05-01), Peltzer
patent: 6260588 (2001-07-01), Noah et al.
patent: 6267641 (2001-07-01), Vanell et al.
patent: 6276404 (2001-08-01), Birtcher et al.
patent: 6536468 (2003-03-01), Wilmer et al.
patent: 6799883 (2004-10-01), Urquhart et al.
patent: 6899452 (2005-05-01), Hamamoto et al.
patent: 6923568 (2005-08-01), Wilmer et al.
patent: 2002/0048213 (2002-04-01), Wilmer et al.
patent: 2003/0095472 (2003-05-01), Fukui
patent: 2003/0103852 (2003-06-01), Schob
patent: 2005/0226746 (2005-10-01), Schob
patent: 1962864 (1971-03-01), None
patent: 2320212 (1974-11-01), None
patent: 02285635 (1990-11-01), None
patent: 07077597 (1995-03-01), None
patent: 424003 (2001-03-01), None
patent: WO 0014512 (2000-03-01), None

Affiliated with

Also associated with

Rating

Method and apparatus for blending process materials does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for blending process materials, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for blending process materials will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3974906