Method and apparatus for blending process materials

Details Method and apparatus for blending process materials Method and apparatus for blending process materials

2005-08-02

2005-08-02

Soohoo, Tony G. (Department: 1723)

Agitating

Having specified feed means

Responsive to condition sensor

C366S152200, C366S162100

Reexamination Certificate

active

06923568

ABSTRACT:
A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.

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