Method and apparatus for blending process materials

Details Method and apparatus for blending process materials Method and apparatus for blending process materials

2011-03-15

2011-03-15

Soohoo, Tony G (Department: 1774)

Agitating

Having interrelated feed and discharge means

Including means to monitor or control operation

C366S137000, C366S151100, C366S152400, C366S159100, C366S336000

Reexamination Certificate

active

07905653

ABSTRACT:
A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.

REFERENCES:
patent: 3161203 (1964-12-01), Hathorn et al.
patent: 3266780 (1966-08-01), Waters
patent: 4059929 (1977-11-01), Bishop
patent: 4242841 (1981-01-01), Ushakov et al.
patent: 4257900 (1981-03-01), White et al.
patent: 4299501 (1981-11-01), Patil et al.
patent: 4319848 (1982-03-01), Lambertini et al.
patent: 4327759 (1982-05-01), Millis
patent: 4407431 (1983-10-01), Hutter, III
patent: 4430054 (1984-02-01), Furuya
patent: 4439042 (1984-03-01), Bertoglio
patent: 4474476 (1984-10-01), Thomsen
patent: 4482704 (1984-11-01), Luetzelschwab
patent: 4621927 (1986-11-01), Hiroi
patent: 4642222 (1987-02-01), Brazelton
patent: 4654802 (1987-03-01), Davis
patent: 4664528 (1987-05-01), Rodgers et al.
patent: 4729832 (1988-03-01), Leonard et al.
patent: 4764019 (1988-08-01), Kaminski et al.
patent: 4869595 (1989-09-01), Lang
patent: 4964732 (1990-10-01), Cadeo et al.
patent: 5098194 (1992-03-01), Kuo et al.
patent: 5255821 (1993-10-01), Hall et al.
patent: 5271521 (1993-12-01), Noss et al.
patent: 5312595 (1994-05-01), Moffett et al.
patent: 5320424 (1994-06-01), Annett et al.
patent: 5332125 (1994-07-01), Schmitkons et al.
patent: 5372421 (1994-12-01), Pardikes
patent: 5403089 (1995-04-01), Kuo et al.
patent: 5407526 (1995-04-01), Danielson et al.
patent: 5423607 (1995-06-01), Jones et al.
patent: 5470150 (1995-11-01), Pardikes
patent: 5476320 (1995-12-01), Taguchi et al.
patent: 5478435 (1995-12-01), Murphy et al.
patent: 5516423 (1996-05-01), Conoby et al.
patent: 5584959 (1996-12-01), Kimura et al.
patent: 5634715 (1997-06-01), Stehr et al.
patent: 5641410 (1997-06-01), Peltzer
patent: 5647391 (1997-07-01), Chan et al.
patent: 5750440 (1998-05-01), Vanell et al.
patent: 5823219 (1998-10-01), Purvis et al.
patent: 5856381 (1999-01-01), Rehmer et al.
patent: 5865537 (1999-02-01), Streiff et al.
patent: 5887974 (1999-03-01), Pozniak et al.
patent: 5887975 (1999-03-01), Mordaunt et al.
patent: 5918976 (1999-07-01), Hashimoto et al.
patent: 5924794 (1999-07-01), O'Dougherty et al.
patent: 5968268 (1999-10-01), Kitano et al.
patent: 5980836 (1999-11-01), Moffett et al.
patent: 5993671 (1999-11-01), Peltzer
patent: 6036354 (2000-03-01), Bandy
patent: 6048256 (2000-04-01), Obeng et al.
patent: 6050283 (2000-04-01), Hoffman et al.
patent: 6059880 (2000-05-01), Kitano et al.
patent: 6105606 (2000-08-01), Jackson
patent: 6120175 (2000-09-01), Tewell
patent: 6149294 (2000-11-01), Jonsson et al.
patent: 6199599 (2001-03-01), Gregg et al.
patent: 6203183 (2001-03-01), Mordaunt et al.
patent: 6207719 (2001-03-01), Pardikes
patent: 6217659 (2001-04-01), Botelho et al.
patent: 6224778 (2001-05-01), Peltzer
patent: 6260588 (2001-07-01), Noah et al.
patent: 6267641 (2001-07-01), Vanell et al.
patent: 6276404 (2001-08-01), Birtcher et al.
patent: 6290384 (2001-09-01), Pozniak et al.
patent: 6799883 (2004-10-01), Urquhart et al.
patent: 6923568 (2005-08-01), Wilmer et al.
patent: 2002/0048213 (2002-04-01), Wilmer et al.
patent: 2002/0154567 (2002-10-01), Husher
patent: 2004/0057334 (2004-03-01), Wilmer et al.
patent: 1962864 (1971-03-01), None
patent: 2320212 (1974-11-01), None
patent: 0443324 (1991-08-01), None
patent: 02285635 (1990-11-01), None
patent: 07077597 (1995-03-01), None
patent: 424003 (2001-03-01), None
patent: WO 0014512 (2000-03-01), None
patent: WO 02 09859 (2002-02-01), None
International Search Report, PCT/US03/22610, dated Nov. 28, 2003.

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