Optics: measuring and testing – By light interference – Having partially reflecting plates in series
Reexamination Certificate
2007-12-04
2007-12-04
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
Having partially reflecting plates in series
Reexamination Certificate
active
10789328
ABSTRACT:
A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed, which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivarible equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter. The apparatus and method may be implemented in a laser lithography light source and/or in an integrated circuit lithography tool.
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Cray William
Cymer Inc.
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