Method and apparatus for automatically positioning a particle be

Details Method and apparatus for automatically positioning a particle be Method and apparatus for automatically positioning a particle be

1985-08-19

1987-11-10

Berman, Jack I.

Radiant energy

Means to align or position an object relative to a source or...

250307, G01N 23225

Patent

active

047059540

ABSTRACT:
A particle probe is positioned to a specific region when an actual position of the specific region appears shifted relative to its rated position due to local fields, and can therefore not be defined with high precision. The particle probe is positioned to a prescribed region. The particle probe is then deflected in the environment of this region such that the particle probe impinges different regions at the prescribed region. The position of the specific region is determined from the measured signals which are triggered given incidence of the particle probe on the different regions. The particle probe is then positioned to the specific region. An electrical line may form a test spot at the specific region wherein one dimension thereof is greater than a width thereof.

REFERENCES:
patent: 3628012 (1971-12-01), Plows
patent: 3644700 (1972-02-01), Kruppa et al.
patent: 4241259 (1980-12-01), Feuerbaum et al.
patent: 4277679 (1981-07-01), Feuerbaum
patent: 4413181 (1983-11-01), Feuerbaum
Siemens Program Service-Siemens System 300, Library Math, 1/1/76.
Trans. of Inst. of Electr. & Comm. Engineers of Japan, vol. E64 (1981) May, No. 5, Tokyo, Japan "Function Testing of Bipolar and MOS LSI Circuits with a Combined Stroboscopic Sem-Microcomputer System, Fujioka et al., pp. 295-301.

Affiliated with

Also associated with

Rating

Method and apparatus for automatically positioning a particle be does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for automatically positioning a particle be, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for automatically positioning a particle be will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1069640