Boots – shoes – and leggings
Patent
1984-02-22
1986-10-21
Krass, Errol A.
Boots, shoes, and leggings
358106, 382 8, 364491, G06F 1520
Patent
active
046189386
ABSTRACT:
An automatic semiconductor wafer inspection system including a wafer inspector, a system computer that performs movement and function control and data storage functions and a high speed image computer. Patterned wafers selected for inspection are automatically transported from cassette storage to a vacuum chuck located on the X-Y stage and positioned in a macro inspection station. The wafer is aligned and the surface illumination is changed to test for macro defects under different lighting conditions and levels of magnification. The reflected light is applied to a camera where the optical image is converted to an electrical representation thereof, stored, and then processed by the high speed image computer. After a wafer has been positioned and inspected in the macro inspection station at low magnification, it is moved by a macro-micro transport arm to the micro inspection station and a unique image previously found in the low power image is found again and used for initial alignment. An autofocus arrangment automatically focusses the objective lens to accomplish the micro inspection tests. Tests are typically carried out at a number of sites, each of which is positioned automatically by the machine.
REFERENCES:
patent: 4185298 (1980-01-01), Billet et al.
patent: 4218142 (1980-08-01), Kryger et al.
patent: 4295198 (1981-10-01), Copeland et al.
patent: 4325077 (1982-04-01), Dunham
patent: 4334241 (1982-06-01), Kashioka et al.
patent: 4389669 (1983-06-01), Epstein et al.
patent: 4475122 (1984-10-01), Green
patent: 4481664 (1984-11-01), Linger et al.
patent: 4486776 (1984-12-01), Yoshida
patent: 4508453 (1985-04-01), Hara et al.
patent: 4532650 (1985-07-01), Wihl et al.
patent: 4556317 (1985-12-01), Sandland et al.
Chadwick Curt H.
Dwyer Howard
Sandland Paul
Singleton Russell M.
Dixon Joseph L.
KLA Instruments Corporation
Krass Errol A.
LandOfFree
Method and apparatus for automatic wafer inspection does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for automatic wafer inspection, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for automatic wafer inspection will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1293217