Method and apparatus for automatic alignment

Details Method and apparatus for automatic alignment Method and apparatus for automatic alignment

1983-09-22

1986-01-07

Rosenberger, R. A.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356400, 350 68, G01B 1100

Patent

active

045630941

ABSTRACT:
Two objects each having mark elements which extend in different directions are aligned. The mark elements are scanned by a linear slit-like illumination area, and the light reflected by the mark elements are used for the alignment. The direction or inclination of the linear-slit-like illumination area is changed, during one scanning deflection, to be in conformity with the mark elements.

REFERENCES:
patent: 4167677 (1979-09-01), Suzki
patent: 4199219 (1980-04-01), Suzki et al.
patent: 4277178 (1981-07-01), Cushing et al.
patent: 4423959 (1984-01-01), Nakazawa et al.

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