Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent
1997-09-12
2000-05-23
Font, Frank G.
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
356372, 356399, 250310, 250307, 250311, G01B 1100, G01N 2300
Patent
active
060671645
ABSTRACT:
A scheme for realizing the automatic adjustment of the electron optics system in an electron optics device such as scanning electron microscope, in which a prescribed number of images sequentially obtained by the electron optics device at sequentially adjusted focal points are stored; a moving amount of a sample image in the stored images is calculated; whether an adjustment of the electron optics system of the electron optics device is necessary or not is judged according to the calculated moving amount of the sample image; and the electron optics system of the electron optics device is adjusted according to the moving amount of the sample image when it is judged that the adjustment of the electron optics system of the electron optics device is necessary. A scheme for realizing the astigmatism correction in a charged particle beam optical system of an electron optics device such as scanning electron microscope is also disclosed.
REFERENCES:
patent: 4392054 (1983-07-01), Sato et al.
patent: 4567369 (1986-01-01), Smith et al.
patent: 5313062 (1994-05-01), Yamada
patent: 5627373 (1997-05-01), Keese
Nakai Hiroaki
Onoguchi Kazunori
Font Frank G.
Kabushiki Kaisha Toshiba
Punnoose Roy M.
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