Optics: measuring and testing – With plural diverse test or art
Reexamination Certificate
2006-09-05
2006-09-05
Evans, F. L. (Department: 2877)
Optics: measuring and testing
With plural diverse test or art
C356S237400, C356S417000, C250S458100
Reexamination Certificate
active
07102737
ABSTRACT:
A method and apparatus for detection of a particular material, such as photo-resist material, on a sample surface are disclosed. A narrow beam of light is projected onto the sample surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a logic circuit, which determines the proper disposition of the sample. The logic circuit controls a sample-handling robotic device which sequentially transfers samples to and from a stage for testing and subsequent disposition. The method is particularly useful for detecting photo-resist material on the surface of a semiconductor wafer.
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Eyolfson Mark
Frank Peter S.
Hochhalter Elton J.
Johnson David R.
Phillips Joe Lee
Evans F. L.
TraskBritt PC
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