Method and apparatus for automated focusing of an interferometri

Details Method and apparatus for automated focusing of an interferometri Method and apparatus for automated focusing of an interferometri

1992-05-04

1993-05-04

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

356356, G01J 120

Patent

active

052084515

ABSTRACT:
A method and apparatus for removing the deleterious effects of interference on the focus error signal when focusing interferometric optical systems using triangulation or astigmatic techniques. These interference effects are eliminated by using the phase relationship between the differential error signal and the total intensity of the beam incident on the differential detector to identify and recover a unique focus position of a surface under test.

REFERENCES:
patent: 4803352 (1989-02-01), Bierleutgeb
patent: 4931630 (1990-06-01), Cohen et al.
patent: 5122648 (1992-06-01), Cohen et al.

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