Semiconductor device manufacturing: process – Miscellaneous
Reexamination Certificate
2006-12-26
2006-12-26
Geyer, Scott B. (Department: 2812)
Semiconductor device manufacturing: process
Miscellaneous
Reexamination Certificate
active
07153788
ABSTRACT:
A method for attaching a workpiece, for example a semiconductor die, to a workpiece holder, for example a lead frame die support, comprises the steps of interposing an uncured adhesive between the semiconductor die and the die support and preheating the adhesive from an ambient temperature to a preheat temperature of between about 150° C. and about 160° C. over a period of about 1.5 seconds. Next, the preheat temperature is maintained for about 1.5 seconds, then the adhesive is further heated to a temperature of between about 190° C. and about 200° C. over a period of about 1.0 second. The inventive method quickly cures the adhesive to secure the die to the support with acceptably low levels of voiding. An apparatus which can be adapted to perform the inventive method is further described.
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Jiang Tongbi
Schrock Ed
Geyer Scott B.
Martin Kevin D.
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