Method and apparatus for assembling an array of micro-devices

Details Method and apparatus for assembling an array of micro-devices Method and apparatus for assembling an array of micro-devices

2006-11-28

2006-11-28

Estrada, Michelle (Department: 2823)

Metal working

Barrier layer or semiconductor device making

C438S005000, C438S007000, C438S464000, C356S508000

Reexamination Certificate

active

07141080

ABSTRACT:
The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electro-mechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.

REFERENCES:
patent: 4797994 (1989-01-01), Michaud et al.
patent: H000629 (1989-04-01), Murdoch
patent: 5979728 (1999-11-01), Alfaro
patent: 6448109 (2002-09-01), Karpman
patent: 6452238 (2002-09-01), Orcutt et al.
patent: 6521477 (2003-02-01), Gooch et al.
patent: 2002/0081816 (2002-06-01), Spooner et al.
patent: 2002/0096743 (2002-07-01), Spooner et al.
Webster's Ninth New Collegiate Dictionary, 1986, Merriam-Webster Inc., 9th, p. 1324.

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