Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2005-05-17
2005-05-17
Nguyen, Tu T. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
Reexamination Certificate
active
06894773
ABSTRACT:
A processing method for semiconductor devices in a semiconductor fabrication line includes processing a substrate in a first processing apparatus, transferring the substrate processed in the first processing apparatus to a detecting apparatus without removal of the substrate from the semiconductor fabrication line while continuing fabrication of the semiconductor devices, detecting foreign particle defects on the substrate transferred to the detecting apparatus, and determining a foreign particle generation condition of the processing apparatus based on a data from the detecting.
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Kembo Yukio
Matsuoka Kazuhiko
Morioka Hiroshi
Nishiyama Hidetoshi
Noguchi Minori
Antonelli Terry Stout & Kraus LLP
Nguyen Tu T.
Renesas Technology Corp.
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