Chemistry: analytical and immunological testing – Condition responsive control
Patent
1991-03-05
1992-09-22
Warden, Robert J.
Chemistry: analytical and immunological testing
Condition responsive control
422 88, 422 93, 422111, 372 59, G01N 3100, H01S 322
Patent
active
051496593
ABSTRACT:
The concentration of molecular fluorine in a mixed gas such as an excimer laser gas can be determined easily, quickly and accurately by passing the mixed gas through a column packed with an alkali metal or alkaline earth metal compound which has no halogen atom and reacts with fluorine to form a solid fluoride together with molecular oxygen and/or carbon dioxide and measuring the concentration of oxygen or carbon dioxide in the fluorine-free gas flowed out of the packed column. If the mixed gas initially contains molecular oxygen or carbon dioxide, its concentration is measured separately after fixing fluorine in another column packed with an element which forms a fluoride. This analyzing method can be used in a feedback control system for controlling the concentration of fluorine in an excimer laser gas during operation of the laser to thereby stabilize the laser output power.
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Aramaki Minoru
Hakuta Kohzo
Kodama Mitsuo
Nakagawa Shinsuke
Nakano Hisaji
Central Glass Company Limited
Snay Jeffrey R.
Warden Robert J.
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