Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1985-07-10
1992-11-17
Baker, Stephen M.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 731, 364579, G01R 3128
Patent
active
051646668
ABSTRACT:
Method and apparatus for analyzing errors or failures in integrated circuits wherein the integrated circuit is displayed on the picture screen of a work station (AS) and the circuit is excited with a test signal such that at least one measuring location is selected on a malfunction path and an actual signal tappable at this measuring location is compared to a rated signal and wherein the fault location is identified from the comparison results at the measuring locations. The object is to execute a method using an electron beam testing apparatus (EMG) such that the simplest possible measured data transfer occurs. For this purpose the selection of the measuring location on the malfunctioning path proceeds such that a portion (23) of the layout of the integrated circuit corresponding to the measuring location is displayed on the picture screen of the work station and the measuring location is marked by a cursor (24) and position signals depending on the positon of the cursor (24) are supplied to the electron beam measuring apparatus for aligning the electron beam (2) to the measuring location and such that the electron beam testing apparatus is utilized for the identification of the actual signal.
REFERENCES:
patent: 4538065 (1985-08-01), Miyoshi et al.
"Electron Beam Testing Methodology", P. Fazekas and Wolfgang, 1983 IEEE, pp. 26-31.
Elektronenstrahl-Besstechnik zur Prufung Integrierter Schaltungen Physik-Verlag 38 (1982) No. 8, pp. 253-258.
Electron Beam Measurements in Practice, Fazekas, Fox, Papp, Widulla and Wolfgang, Scanning Electron Microscopy 1983/IV, pp. 1595-1604, Sem Inc.
IBM Technical Disclosure Bulletin, De Stafeno et al., "Voltage Comparator System for Contactless . . . ", vol. 17, No. 10, Mar. 1975, pp. 2871-2873.
Wolfgang Eckhard
Zibert Klaus
Baker Stephen M.
ICT Integrated Circuit Testing Gesellschaft fur Halbeleiterpruft
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