X-ray or gamma ray systems or devices – Specific application – Fluorescence
Patent
1994-11-25
1996-06-18
Church, Craig E.
X-ray or gamma ray systems or devices
Specific application
Fluorescence
378210, G01N 23223
Patent
active
055286488
ABSTRACT:
The fluorescent X-ray generated by elements when an X-ray is total reflected from a substrate surface is detected by a fluorescent X-ray detecting circuit; the fluorescent X-ray peak generated by the substrate element and the fluorescent X-ray peaks generated by contaminative elements are separated by a peak separating circuit; an integral intensity I.sub.0 of the fluorescent X-ray peak generated by the substrate element and integral intensities I of the fluorescent X-ray peaks generated by the contaminative elements are calculated by an integral intensity calculating circuit, respectively; and contaminative element concentrations N=N.sub.0 .multidot.(.eta..sub.0 / I.sub.0).multidot.(I / .eta.) (where N.sub.0 denotes the surface concentration of the substrate; .eta..sub.0 denotes the fluorescent yield of the substrate; and .eta. denotes the fluorescent yield of the contaminative elements) are calculated by a contaminative element concentration calculating circuit on the basis of the calculated integral intensities I.sub.0 and I. The contaminative elements can be analyzed non-destructively without use of any analytical curves, so that it is possible to save much labor required to prepare the analytical curves.
REFERENCES:
patent: 5422925 (1995-06-01), Komatsu et al.
patent: 5430786 (1995-07-01), Komatsu et al.
Komatsu Fumio
Miyazaki Kunihiro
Shimazaki Ayako
Church Craig E.
Kabushiki Kaisha Toshiba
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