Method and apparatus for analysis of gases using plasma

Details Method and apparatus for analysis of gases using plasma Method and apparatus for analysis of gases using plasma

1991-08-30

1993-10-12

Anderson, Bruce C.

Radiant energy

Ionic separation or analysis

250282, 2502521, B01D 5944, H01J 4900

Patent

active

052528278

ABSTRACT:
In the analysis of a specimen gas for at least one impurity, the specimen is fed to a microwave-induced plasma and the plasma is analyzed for the impurity. The plasma is formed by gases fed to it via an inner tube and an outer tube around said inner tube. The specimen is fed in undiluted form via the inner tube and a second gas which may be a standard gas is fed via the outer tube. The specimen gas and the second gas have compositions which are the same as to at least 75% by volume, e.g. are both air. A variety of analysis processes is made available.

REFERENCES:
patent: 4148612 (1979-04-01), Taylor et al.
patent: 4948962 (1990-08-01), Mitsui et al.
patent: 4955717 (1990-09-01), Henderson
patent: 5130537 (1992-07-01), Okamoto et al.

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