Method and apparatus for an optical sensor utilizing semiconduct

Thermal measuring and testing – Temperature measurement – Nonelectrical – nonmagnetic – or nonmechanical temperature...

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350317, 73705, G01L 700, G01K 562

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043559107

ABSTRACT:
A method and resulting apparatus for implementing a unique optical sensor that is adapted to be interfaced with a low cost, compact fiber-optic transmission system to provide an accurate indication of a sensed physical parameter (e.g. temperature) of a remote sample. The sensor is fabricated so as to include a semiconductor material that has optical-wavelength-dependent filter characteristics that may be varied as a function of a physical parameter such as temperature. In one embodiment, a graded optical filter fabricated by using thin-film deposition techniques on an amorphous semiconductor material, provides position responsive high-pass filter characteristics. Such filter characteristics are then utilized by moving a light source as a function of a physical parameter and generating an optical signal therefrom having a cutoff frequency dependent upon the position of the light source. In another embodiment, the temperature dependent frequency cutoff characteristics in the absorption edge of amorphous selenium, are utilized more directly in an optical temperature sensor. The optical utilization of amorphous semiconductor material is a particularly advantageous feature of the invention in reducing the cost and complexity of semiconductor optical filters.

REFERENCES:
patent: 3025763 (1962-03-01), Schwartz
patent: 3044349 (1962-07-01), Watrous
patent: 3304431 (1967-02-01), Biard
patent: 3960017 (1976-06-01), Romanowski
patent: 4047817 (1977-09-01), Enomoto
patent: 4136566 (1979-01-01), Christenson
Handbook of Chemistry and Physics; Published by Chemical Rubber Publishing Co.; Copyright 1956.
"Optical Constants of Germanium, Silicon and Pyrite in the Infrared", by Simon; Journal of the Optical Society of America, vol. 41, No. 10, p. 730, Oct. 1951.

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