Method and apparatus for an integrated laser beam scanner using

Details Method and apparatus for an integrated laser beam scanner using Method and apparatus for an integrated laser beam scanner using

1998-12-01

2000-01-11

Spyrou, Cassandra

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

359850, 359224, G02B 2608

Patent

active

060142405

ABSTRACT:
An solid state scanning system having a single crystal silicon deflection mirror and scanning mirror is integrated with a light source. Separation of the micro-electro-mechanical systems and light emitters on separate substrates allows the use of flip-chip and solder bump bonding techniques for mounting of the light sources. The separate substrates are subsequently full wafer bonded together to create an integrated solid state scanning system.

REFERENCES:
patent: 5629790 (1997-05-01), Neukermans et al.
Daneman, M.J.; Solgaard, O.; Tien, N.C.; Lau, K.Y.; Muller, R.S. "Laser-to-Fiber Coupling Module using a Micromachined Alignment Mirror." IEEE Photonics Technology Letters, vol. 8, No. 3, Mar. 1996, pp. 396-398.
Judy, J.W.; Muller, R.S. "Batch-Fabricated, Addressable, Magnetically Actuated Microstructures." Solid-State Sensor and Actuator Workshop, Hilton Head, South Carolina, Jun. 2-6, 1996, pp. 187-190.
Lin, L.Y.: Lee, S.S.; Pister, K.S.J.; Wu, M.C. "Self-aligned hybrid integration of semiconductor lasers with micromachined micro-optics for optoelectronic packaging." Appl. Phys. Lett. 66 (22), May 29, 1995, .COPYRGT.1995 American Institute of Physics, pp. 2946-2948.

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