Method and apparatus for an integrated laser beam scanner

Details Method and apparatus for an integrated laser beam scanner Method and apparatus for an integrated laser beam scanner

2006-09-05

2006-09-05

Juba, John (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S224200, C359S850000

Reissue Patent

active

RE039261

ABSTRACT:
A solid state laser beam scanning system having a single crystal silicon deflection and scanning mirror integrated with a laser diode. By combining the techniques of deep reactive ion etching of silicon with solder bump bonding techniques, completed and tested laser diodes are integrated with silicon substrates supporting micro-electro-mechanical systems layers.

REFERENCES:
patent: 5490034 (1996-02-01), Zavracky et al.
patent: 5493470 (1996-02-01), Zavracky et al.
patent: 5498893 (1996-03-01), Usui et al.
patent: 5612230 (1997-03-01), Yuzurihara et al.
patent: 5625483 (1997-04-01), Swartz
patent: 5629790 (1997-05-01), Neukermans
patent: 5721162 (1998-02-01), Schubert et al.
patent: 5725729 (1998-03-01), Greiff
patent: 5742419 (1998-04-01), Dickensheets
patent: 5867297 (1999-02-01), Kiang
patent: 5882981 (1999-03-01), Rajgopal et al.
patent: 5903380 (1999-05-01), Motamedi
patent: 2002/0067533 (2002-06-01), Sun
Daneman. M.J.; Solgaard, O; Tien, N.C.; Lau, K.Y.; Muller, R.S., “Laser-to-fiber coupling module using a macromachined alignment mirror”, IEEE Photonics Technology Letters, vol. 8, No. 3, Mar. 1996, pp. 396-398.
Judy, J.W.; Muller, R.S., “Batch-fabricated, addressable, magnetically actuated microstructures.” , Solid State Sensor and Actuator Workshop, Hilton Head, South Carolina, Jun. 2-6, 1996, pp. 187-190.
Lin, L.Y; Les S.S; Pister, K.S.J.; Wu, M.C., “Self-aligned hybrid integration of semiconductor lasers with micromachined micro-optics for optoelectronic packaging” , Appl. Phys. Lett. 66 (22), May 29, 1995, pp. 2946-2948.

Affiliated with

Also associated with

Rating

Method and apparatus for an integrated laser beam scanner does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for an integrated laser beam scanner, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for an integrated laser beam scanner will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3598418