Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Patent
1998-12-01
1999-12-14
Spyrou, Cassandra
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
359850, 359224, G02B 2608
Patent
active
060025077
ABSTRACT:
A solid state laser beam scanning system having a single crystal silicon deflection and scanning mirror integrated with a laser diode. By combining the techniques of deep reactive ion etching of silicon with solder bump bonding techniques, completed and tested laser diodes are integrated with silicon substrates supporting micro-electro-mechanical systems layers.
REFERENCES:
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5742419 (1998-04-01), Dickensheets
Daneman, M.J.; Solgaard, O.; Tien, N.C.; Lau, K.Y.; Muller, R.S. "Laser-to-Fiber Coupling Module Using a Micromachined Alignment Mirror." IEEE Photonics Technology Letters, vol. 8, No. 3, Mar. 1996, pp. 396-398.
Judy, J.W.; Muller, R.S. "Batch-Fabricated, Addressable, Magnetically Actuated Microstructures." Solid-State Sensorand Actuator Workshop, Hilton Head, South Carolina, Jun. 2-6, 1996, pp. 187-190.
Lin, L.Y.; Lee, S.S.; Pister, K.S.J.; Wu, M.C. "Self-aligned hybrid integration of semiconductor lasers with micromachined micro-optics for optoelectronic packaging." Appl. Phys. Lett.66 (22), May 29, 1995, .COPYRGT.1995 American Institute of Physics, pp. 2946-2948.
Floyd Philip D.
Kubby Joel A.
Sun Decai
Boutsikaris Leo
Spyrou Cassandra
Xerox Corpoation
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