Method and apparatus for an in-situ ultraviolet cleaning tool

Details Method and apparatus for an in-situ ultraviolet cleaning tool Method and apparatus for an in-situ ultraviolet cleaning tool

2011-04-12

2011-04-12

Kornakov, Michael (Department: 1714)

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

C134S105000, C134S137000

Reexamination Certificate

active

07921859

ABSTRACT:
The present invention provides an apparatus and a method for an ultraviolet cleaning tool. The cleaning tool includes ultraviolet source spaced apart from a surface having contaminant particles. The ultraviolet source can create ozone between the surface and the ultraviolet source which breaks the chemical bonds between particles and the surface. The apparatus includes a gas feed which introduces a gas to aid the chemical bond. Additionally, the gas feed can introduce a gas to remove the particles from the surface.

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Definition of “Couple”; Cambridge Dictionaries Online.
Definition of “Couple”; Merriam Webster's Collegiate Dictionary, tenth edition, published 1999.
Japanese Office Action, issued in Japanese Patent Application No. 2005-363934, mailed July 6, 2010.

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