Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1996-02-01
1998-05-12
Epps, Georgia Y.
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359247, G02B 2600
Patent
active
057514690
ABSTRACT:
An improved modulator and methods for making the modulator are disclosed. A membrane, preferably circular in shape, is formed over a region of a substrate in such a way that a gap results between the membrane and substrate forming a modulator cavity. The membrane forms a continuous surface over the cavity. In particular, the membrane is not supported by discrete support arms, but rather extends beyond the modulator cavity. Preferably, holes are formed in the membrane to aid in damping its motion and to allow access to underlying layers during modulator formation. According to the method, the modulator is formed by forming a means for creating a gap between the substrate and the membrane, forming a membrane, forming a lateral conduit to aid in removing the means for creating the gap and, finally, by removing the means for creating the gap.
REFERENCES:
patent: 5280173 (1994-01-01), Morse et al.
patent: 5500761 (1996-03-01), Goossen et al.
Ladabaum et al., "Micromachined Ultrasonic Transducers: 11.4 MHz Transmission in air and more," Appl. Phys. Lett. 68(1), pp. 7-9, Jan. 1996.
Spoliansky et al., "Micromachined Ultrasonic Air-Transducers," Microelectric Eng. v.30, pp. 535-538, 1996.
Arney Susanne C.
Greywall Dennis Stanley
Walker James A.
Yurke Bernard
Bey Dawn-Marie
Epps Georgia Y.
Lucent Technologies - Inc.
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