Method and apparatus for an improved micromechanical modulator

Details Method and apparatus for an improved micromechanical modulator Method and apparatus for an improved micromechanical modulator

1997-02-24

1998-09-15

Epps, Georgia Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

216 72, G02B 2600

Patent

active

058087818

ABSTRACT:
An improved modulator and methods for making the modulator are disclosed. A membrane, preferably circular in shape, is formed over a region of a substrate in such a way that a gap results between the membrane and substrate forming a modulator cavity. The membrane forms a continuous surface over the cavity. In particular, the membrane is not supported by discrete support arms, but rather extends beyond the modulator cavity. Preferably, holes are formed in the membrane to aid in damping its motion and to allow access to underlying layers during modulator formation. According to the method, the modulator is formed by forming a means for creating a gap between the substrate and the membrane, forming a membrane, forming a lateral conduit to aid in removing the means for creating the gap and, finally, by removing the means for creating the gap.

REFERENCES:
patent: 5531121 (1996-07-01), Sparks et al.
Zhang et al., Digest IEEE Int. Conf. on Solid State Sensors and Actuators, pp. 520-523, 1991.

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