Method and apparatus for an improved micro-electrical mechanical

Details Method and apparatus for an improved micro-electrical mechanical Method and apparatus for an improved micro-electrical mechanical

1998-11-23

2000-10-03

Jackson, Stephen W.

Electrical transmission or interconnection systems

Switching systems

Condition responsive

200181, H01H 5700

Patent

active

061277444

ABSTRACT:
A method, device and circuit which applies an electrostatic repulsion pushing force to a MEM switch armature during an opening process. The repulsive force adds to the spring restoration force on the armature, increasing the opening speed of the switch and aids in overcoming stiction effects. The inventive switch includes a contact electrically connected to a first terminal of the switch. A throw is electrically connected to a second terminal of the switch. Finally, a mechanism is provided for opening the switch by electrostatically causing the throw to disengage the contact. In the illustrative implementation, the mechanism for opening the switch includes a first charge storage structure mounted on the throw and a second charge storage structure mounted in proximity to the first charge storage structure. When charges are applied between the first and the second charge storage structures, a force of repulsion is created or a force of attraction is created depending on the polarity of the potential.

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