Method and apparatus for alignment

Details Method and apparatus for alignment Method and apparatus for alignment

1984-03-14

1987-06-02

Evans, F. L.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

250548, 356400, G01B 1100

Patent

active

046698833

ABSTRACT:
A method and apparatus for aligns two members each having an alignment mark which has mark elements extending in different directions. The marks are scanned with two linear illumination areas which are spaced apart by a predetermined distance and extend in different directions.

REFERENCES:
patent: 4199219 (1980-04-01), Suzki et al.
patent: 4277178 (1981-07-01), Cushing et al.
patent: 4423959 (1984-01-01), Nakazawa et al.
patent: 4515481 (1985-05-01), Yamada et al.
patent: 4531060 (1985-07-01), Suwa et al.

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